The Influence of Uncontrolled Technological Impurities on the Temperature Dependence of the Gain Coefficient of a Bipolar n-p-n–Transistor

Abstract

Herein, the temperature dependences of the static current gain (β) of bipolar n-p-n-transistors, formed by similar process flows (series A and B), in the temperature range 20–125 °С was investigated. The content of uncontrolled technological impurities in the A series devices was below the detection limit by the TXRF method (for Fe < 4.0×10^9 at/cm^2). In series B devices, the entire surface of the wafers was covered with a layer of Fe with an average concentration of 3.4×10^11 at/cm^2; Cl, K, Ca, Ti, Cr, Cu, Zn spots were also observed. It was found that in B series devices at an average collector current level (1.0×10^–6 < Ic <1.0×10^–3 A) the static current gain was greater than the corresponding value in A series devices. This was due to the higher efficiency of the emitter due to the high concentration of the main dopant. This circumstance also determined a stronger temperature dependence of β in series B devices due to a significant contribution to its value from the temperature change in the silicon band gap. At Ic < 1.0×10^–6 A β for B series devices became significantly less than the corresponding values for A series devices and practically ceases to depend on temperature. In series B devices, the recombination-generation current prevailed over the useful diffusion current of minority charge carriers in the base due to the presence of a high concentration of uncontrolled technological impurities. For A series devices at Ic < 10^–6 A, the temperature dependence of β practically did not differ from the analogous dependence for the average injection level.