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Please use this identifier to cite or link to this item: https://elib.bsu.by/handle/123456789/236513
Title: Diffraction diamond grating formed by silver-ion mask implantation
Authors: Stepanov, A. L.
Nuzhdin, V. I.
Kazuchits, N. M.
Valeev, V. F.
Keywords: ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика
Issue Date: 2019
Publisher: Elsevier
Citation: Vacuum 164 (2019) 332-335
URI: http://elib.bsu.by/handle/123456789/236513
DOI: 10.1016/j.vacuum.2019.03.045
Appears in Collections:Кафедра физики полупроводников и наноэлектроники (статьи)

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