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https://elib.bsu.by/handle/123456789/226446| Title: | Разрешимость задачи об автолегировании кремния примесью скрытого слоя |
| Authors: | Корзюк, В. И. Чеб, Е. С. |
| Keywords: | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Математика |
| Issue Date: | 1998 |
| Publisher: | Минск : Універсітэцкае |
| Citation: | Вестник Белорусского государственного университета. Сер. 1, Физика. Математика. Информатика. – 1998. – № 3. – С. 23-30. |
| Abstract: | This work is examined the mathematical model of description of profile and concentration of incorporated impurity during the process of high-temperature annealing with epitaxial growth ill the one-dimensional geometry. For corresponding mathematical problem it is proved energetic inequalities and its solvability in case of Pick’s linear equation using averaging operators with variable step. |
| URI: | http://elib.bsu.by/handle/123456789/226446 |
| ISSN: | 0321-0367 |
| Licence: | info:eu-repo/semantics/openAccess |
| Appears in Collections: | 1998, №3 (сентябрь) |
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