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dc.contributor.authorКорзюк, В. И.-
dc.contributor.authorЧеб, Е. С.-
dc.date.accessioned2019-08-07T08:51:18Z-
dc.date.available2019-08-07T08:51:18Z-
dc.date.issued1998-
dc.identifier.citationВестник Белорусского государственного университета. Сер. 1, Физика. Математика. Информатика. – 1998. – № 3. – С. 23-30.ru
dc.identifier.issn0321-0367-
dc.identifier.urihttp://elib.bsu.by/handle/123456789/226446-
dc.description.abstractThis work is examined the mathematical model of description of profile and concentration of incorporated impurity during the process of high-temperature annealing with epitaxial growth ill the one-dimensional geometry. For corresponding mathematical problem it is proved energetic inequalities and its solvability in case of Pick’s linear equation using averaging operators with variable step.ru
dc.language.isoruru
dc.publisherМинск : Універсітэцкаеru
dc.rightsinfo:eu-repo/semantics/openAccessen
dc.subjectЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Математикаru
dc.titleРазрешимость задачи об автолегировании кремния примесью скрытого слояru
dc.typearticleru
Appears in Collections:1998, №3 (сентябрь)

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