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Please use this identifier to cite or link to this item: https://elib.bsu.by/handle/123456789/226446
Title: Разрешимость задачи об автолегировании кремния примесью скрытого слоя
Authors: Корзюк, В. И.
Чеб, Е. С.
Issue Date: 1998
Publisher: Минск : Універсітэцкае
Citation: Вестник Белорусского государственного университета. Сер. 1, Физика. Математика. Информатика. – 1998. – № 3. – С. 23-30.
Abstract: This work is examined the mathematical model of description of profile and concentration of incorporated impurity during the process of high-temperature annealing with epitaxial growth ill the one-dimensional geometry. For corresponding mathematical problem it is proved energetic inequalities and its solvability in case of Pick’s linear equation using averaging operators with variable step.
URI: http://elib.bsu.by/handle/123456789/226446
ISSN: 0321-0367
Licence: info:eu-repo/semantics/openAccess
Appears in Collections:1998, №3 (сентябрь)

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