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https://elib.bsu.by/handle/123456789/48358| Title: | Ion bombardment techniques - recent developments in SIMS |
| Authors: | Konarski, Piotr Miśnik, Maciej |
| Keywords: | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика |
| Issue Date: | 2013 |
| Abstract: | New applications of ion bombardment in secondary ion mass spectrometry (SIMS) are reviewed. Recent development and application of cluster ion bombardment in SIMS method are discussed. Also discussed is recently developed, one of quantitative SIMS techniques – “storing matter” technique. Presented is new design quadrupole based SIMS spectrometer allowing to perform “storing matter” technique in one analytical chamber. Examples of depth profile analysis of Cr implanted inconel 600 alloy obtained with the use of ‘standard’ and ‘storing matter’ SIMS are presented. |
| URI: | http://elib.bsu.by/handle/123456789/48358 |
| Appears in Collections: | 2013. Взаимодействие излучений с твердым телом |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Konarski .pdf | 251,87 kB | Adobe PDF | View/Open |
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