Logo BSU

Please use this identifier to cite or link to this item: https://elib.bsu.by/handle/123456789/305238
Full metadata record
DC FieldValueLanguage
dc.contributor.authorKharchenko, A. A.-
dc.contributor.authorBrinkevich, D. I.-
dc.contributor.authorBrinkevich, S. D.-
dc.contributor.authorProsolovich, V. S.-
dc.date.accessioned2023-11-28T17:11:10Z-
dc.date.available2023-11-28T17:11:10Z-
dc.date.issued2023-07-14-
dc.identifier.citationHigh Energy Chemistry. – 2023. – Vol. 57, No. 6. – P. 498–503.ru
dc.identifier.issn1608-3148 (Electronic)-
dc.identifier.issn0018-1439 (Print)-
dc.identifier.urihttps://elib.bsu.by/handle/123456789/305238-
dc.description.abstractFP9120 diazoquinone–novolac positive photoresist films 1.5 μm thick implanted with Ag+ ions and supported on the surface of KDB-10 (111) silicon wafers by centrifugation have been studied by measuring reflection spectra. It has been shown that ion implantation leads to a decrease in the refractive index of the photoresist due to radiation crosslinking of novolac resin molecules and a decrease in the density ρ and the molecular refraction RM of the photoresist. It has been established that the reflection coefficient in the opaque region of the photoresistive film increases with the Ag+ implantation dose. The changes observed in the optical properties of the films under ion implantation conditions are explained taking into account radiation-chemical processes in the phenol–formaldehyde photoresist.ru
dc.language.isoenru
dc.publisherPleiades Publishing, Ltd.ru
dc.rightsinfo:eu-repo/semantics/restrictedAccessru
dc.subjectЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физикаru
dc.subjectЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Химияru
dc.titleRadiation-Induced Alteration of the Reflection Spectra of Diazoquinone–Novolac Photoresist Films by Implantation of Ag+ Ionsru
dc.typearticleru
dc.rights.licenseCC BY 4.0ru
dc.identifier.DOI10.1134/S0018143923060061-
Appears in Collections:Кафедра физики полупроводников и наноэлектроники (статьи)

Files in This Item:
File Description SizeFormat 
HighEn2306006KharchenkoKOR.pdf363,82 kBAdobe PDFView/Open
Show simple item record Google Scholar



Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.