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https://elib.bsu.by/handle/123456789/259300| Заглавие документа: | Morphology of multilayer AlN/SiN coatings with layers of different thickness |
| Авторы: | Kuznetsova, T. A. Lapitskaya, V. A. Chizhik, S. A. Uglov, V. V. Shymanski, V. I. Kvasov, N. T. |
| Тема: | ЭБ БГУ::ТЕХНИЧЕСКИЕ И ПРИКЛАДНЫЕ НАУКИ. ОТРАСЛИ ЭКОНОМИКИ::Электроника. Радиотехника ЭБ БГУ::ТЕХНИЧЕСКИЕ И ПРИКЛАДНЫЕ НАУКИ. ОТРАСЛИ ЭКОНОМИКИ::Металлургия |
| Дата публикации: | 2018 |
| Издатель: | Institute of Physics Publishing |
| Библиографическое описание источника: | IOP Conference Series: Materials Science and Engineering; 2018. |
| Аннотация: | Monolayer AlN coating and multilayer AlN/SiN coatings with single layer thickness of 10 nm and 5 nm were formed using reactive magnetron sputtering. The surface microstructure of these coatings was investigated using atomic force microscopy. Roughness, adhesion forces, and friction coefficient for different layers of coatings were determined. © 2018 Institute of Physics Publishing. All rights reserved. |
| URI документа: | https://elib.bsu.by/handle/123456789/259300 |
| DOI документа: | 10.1088/1757-899X/443/1/012018 |
| Scopus идентификатор документа: | 85057497131 |
| Финансовая поддержка: | This research was supported by the grant of SPSR "Energy Systems, Processes and Technologies"-2.6.NT-MDT Spectrum Instruments,Ostec-ArtTool Ltd.,Promenergolab LLC,Russian Foundation for Basic Research,Taylor and Francis Group |
| Appears in Collections: | Кафедра физики твердого тела и нанотехнологий (статьи) |
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| File | Description | Size | Format | |
|---|---|---|---|---|
| Kuznetsova_2018_IOP_Conf._Ser.__Mater._Sci._Eng._443_012018.pdf | 821,01 kB | Adobe PDF | Открыть |
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