Please use this identifier to cite or link to this item:
https://elib.bsu.by/handle/123456789/259300| Title: | Morphology of multilayer AlN/SiN coatings with layers of different thickness |
| Authors: | Kuznetsova, T.A. Lapitskaya, V.A. Chizhik, S.A. Uglov, V.V. Shymanski, V.I. Kvasov, N.T. |
| Keywords: | ЭБ БГУ::ТЕХНИЧЕСКИЕ И ПРИКЛАДНЫЕ НАУКИ. ОТРАСЛИ ЭКОНОМИКИ::Электроника. Радиотехника ЭБ БГУ::ТЕХНИЧЕСКИЕ И ПРИКЛАДНЫЕ НАУКИ. ОТРАСЛИ ЭКОНОМИКИ::Металлургия |
| Issue Date: | 2018 |
| Publisher: | Institute of Physics Publishing |
| Citation: | IOP Conference Series: Materials Science and Engineering; 2018. |
| Abstract: | Monolayer AlN coating and multilayer AlN/SiN coatings with single layer thickness of 10 nm and 5 nm were formed using reactive magnetron sputtering. The surface microstructure of these coatings was investigated using atomic force microscopy. Roughness, adhesion forces, and friction coefficient for different layers of coatings were determined. © 2018 Institute of Physics Publishing. All rights reserved. |
| URI: | https://elib.bsu.by/handle/123456789/259300 |
| DOI: | 10.1088/1757-899X/443/1/012018 |
| Scopus: | 85057497131 |
| Sponsorship: | This research was supported by the grant of SPSR "Energy Systems, Processes and Technologies"-2.6.NT-MDT Spectrum Instruments,Ostec-ArtTool Ltd.,Promenergolab LLC,Russian Foundation for Basic Research,Taylor and Francis Group |
| Appears in Collections: | Кафедра физики твердого тела и нанотехнологий (статьи) |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Kuznetsova_2018_IOP_Conf._Ser.__Mater._Sci._Eng._443_012018.pdf | 821,01 kB | Adobe PDF | View/Open |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.