Please use this identifier to cite or link to this item:
https://elib.bsu.by/handle/123456789/247134| Title: | Термическая обработка борофосфоросиликатных стекол |
| Authors: | Лабуда, А. А. Сидерко, А. А. |
| Keywords: | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика |
| Issue Date: | 1994 |
| Publisher: | Минск : Універсітэцкае |
| Citation: | Вестник Белорусского государственного университета. Сер. 1, Физика. Математика. Механика. – 1994. – № 3. – С. 36-39. |
| Abstract: | Thermal processing of borophosphosilicate glasses has been studied in the relief-planarization process of integrated circuits and the optimum parameters of this process have been determined |
| URI: | https://elib.bsu.by/handle/123456789/247134 |
| ISSN: | 0321-0367 |
| Licence: | info:eu-repo/semantics/openAccess |
| Appears in Collections: | 1994, №3 (сентябрь) |
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