Please use this identifier to cite or link to this item:
https://elib.bsu.by/handle/123456789/247134Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Лабуда, А. А. | - |
| dc.contributor.author | Сидерко, А. А. | - |
| dc.date.accessioned | 2020-08-03T11:26:27Z | - |
| dc.date.available | 2020-08-03T11:26:27Z | - |
| dc.date.issued | 1994 | - |
| dc.identifier.citation | Вестник Белорусского государственного университета. Сер. 1, Физика. Математика. Механика. – 1994. – № 3. – С. 36-39. | ru |
| dc.identifier.issn | 0321-0367 | - |
| dc.identifier.uri | https://elib.bsu.by/handle/123456789/247134 | - |
| dc.description.abstract | Thermal processing of borophosphosilicate glasses has been studied in the relief-planarization process of integrated circuits and the optimum parameters of this process have been determined | ru |
| dc.language.iso | ru | ru |
| dc.publisher | Минск : Універсітэцкае | ru |
| dc.rights | info:eu-repo/semantics/openAccess | en |
| dc.subject | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика | ru |
| dc.title | Термическая обработка борофосфоросиликатных стекол | ru |
| dc.type | article | ru |
| dc.rights.license | CC BY 4.0 | ru |
| Appears in Collections: | 1994, №3 (сентябрь) | |
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