Please use this identifier to cite or link to this item:
https://elib.bsu.by/handle/123456789/204488
Title: | Процессы атомного перемешивания и распыления при облучении структур Al-Cu ионами Ar , Kr , Xe |
Other Titles: | Ion beam mixing and sputtering of Al-Cu structure by accelerated Ar+, Kr+, Xe+ ions / V. V. Tuljev, I. S. Tashlykov |
Authors: | Тульев, В. В. Ташлыков, И. С. |
Keywords: | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика |
Issue Date: | 1999 |
Publisher: | Минск : БГУ |
Citation: | Взаимодействие излучений с твердым телом: Материалы III междунар. науч. конф., 6-8 окт. 1999 г., Минск: В 2 ч. Ч.1. — Мн.: БГУ, 1999. — С. 160-162. |
Abstract (in another language): | The influence of the accelerated Ar, Kr and Xe ions on the efficiency of ion beam mixing processes across Al-Cu interface and sputtering of the top copper layer was studied. The mixing profiles and layer concentrations of elements were obtained by using the RBS technique and computer simulation programmes. |
URI: | http://elib.bsu.by/handle/123456789/204488 |
ISBN: | 985-445-236-0 |
Appears in Collections: | 1999. Взаимодействие излучений с твердым телом |
Files in This Item:
File | Description | Size | Format | |
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160-162.pdf | 257,84 kB | Adobe PDF | View/Open |
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