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Please use this identifier to cite or link to this item: https://elib.bsu.by/handle/123456789/204488
Title: Процессы атомного перемешивания и распыления при облучении структур Al-Cu ионами Ar , Kr , Xe
Other Titles: Ion beam mixing and sputtering of Al-Cu structure by accelerated Ar+, Kr+, Xe+ ions / V. V. Tuljev, I. S. Tashlykov
Authors: Тульев, В. В.
Ташлыков, И. С.
Keywords: ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика
Issue Date: 1999
Publisher: Минск : БГУ
Citation: Взаимодействие излучений с твердым телом: Материалы III междунар. науч. конф., 6-8 окт. 1999 г., Минск: В 2 ч. Ч.1. — Мн.: БГУ, 1999. — С. 160-162.
Abstract (in another language): The influence of the accelerated Ar, Kr and Xe ions on the efficiency of ion beam mixing processes across Al-Cu interface and sputtering of the top copper layer was studied. The mixing profiles and layer concentrations of elements were obtained by using the RBS technique and computer simulation programmes.
URI: http://elib.bsu.by/handle/123456789/204488
ISBN: 985-445-236-0
Appears in Collections:1999. Взаимодействие излучений с твердым телом

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