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Browsing by Author Tsurko, V. A.

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Issue Date	Title	Author(s)
2003	Diffusion of ion-implanted As in Si: influence of the elastic stress	Velichko, O. I.; Dobrushkin, V. A.; Tsurko, V. A.
2009	Numerical method for computer modeling of diffusion of implanted dopant atoms in silicon in modern VLSI technology	Khina, B. B.; Tsurko, V. A.; Zayats, G. M.
2001	Simulation of plasma assisted doping of silicon	Velichko, O. I.; Dobrushkin, V. A.; Tsurko, V. A.; Senko, N. A.

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