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https://elib.bsu.by/handle/123456789/342807| Title: | Laser plasma spectral characteristics for combined magnetron and laser deposition |
| Authors: | Burmakou, A. Lyudchik, O. Kuleshov, V. Saladukha, D. |
| Keywords: | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика ЭБ БГУ::ТЕХНИЧЕСКИЕ И ПРИКЛАДНЫЕ НАУКИ. ОТРАСЛИ ЭКОНОМИКИ::Электроника. Радиотехника |
| Issue Date: | 2012 |
| Publisher: | Kovcheg |
| Citation: | Plasma physics and plasma technology, Minsk, Belarus, 17–21 сентября 2012 года. Vol. Volume I. – Minsk, Belarus: Kovcheg, 2012. – P. 270-273 |
| Abstract: | The paper discusses the installation of combined pulsed laser and magnetron deposition of thin-film structures with controlled plasma flow conditions and the ability to study the plasma parameters. Two-pulse laser plasma spectral features are presented. A method to enhance energy, charge and elemental composition of the formed plasma as the main components in the thin film deposition process is released |
| URI: | https://elib.bsu.by/handle/123456789/342807 |
| Licence: | info:eu-repo/semantics/openAccess |
| Appears in Collections: | Кафедра квантовой радиофизики и оптоэлектроники. Статьи |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Бурмаков1.pdf | 739,89 kB | Adobe PDF | View/Open |
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