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https://elib.bsu.by/handle/123456789/233895| Title: | Surface Erosion of Multilayer CrN/a-Si3N4 Films under He Ions Implantation |
| Authors: | Uglov, Vladimir Abadias, Gregory Zlotski, Sergey Malashevich, Alexander Saladukhin, Igor Barkouskay, Maryna |
| Keywords: | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика |
| Issue Date: | 2019 |
| Publisher: | Минск : БГУ |
| Citation: | Взаимодействие излучений с твердым телом = Interaction of Radiation with Solids : материалы 13-й Междунар. конф., Минск, Беларусь, 30 сент. – 3 окт. 2019 г. / редкол.: В. В. Углов (отв. ред.) [и др.]. – Минск : БГУ, 2019. – С. 33-36. |
| Abstract: | The effect of He ions implantation on surface erosion in multilayer CrN/a-Si3N4 films was studied using scanning electron and atomic force microscopy. The CrN/a-Si 3N4 multilayer films with deferent thickness of CrN and Si3N4 layers on a Si (100) substrate were grown via magnetron sputtering. These multilayer films were implanted with 40 keV He 2+ ions with doses of (3-11)∙10 17 cm-2 . AFM studies of the surface of implanted films showed the formation of open blisters consisting of two levels. Low surface erosion in multilayer films with a thickness of the amorphous layer exceeding crystalline was found in comparison with mononitride CrN films. Studies have shown the promising use of crystalline/amorphous boundaries to increase the resistance of materials to radiation erosion. |
| Description: | Секция 1. Процессы взаимодействия излучения и плазмы с твердым телом = Section 1. Processes of Radiation and Plasma Interaction with Solids |
| URI: | http://elib.bsu.by/handle/123456789/233895 |
| ISSN: | 2663-9939 |
| Appears in Collections: | 2019. Взаимодействие излучений с твердым телом = Interaction of Radiation with Solids |
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