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https://elib.bsu.by/handle/123456789/233895Полная запись метаданных
| Поле DC | Значение | Язык |
|---|---|---|
| dc.contributor.author | Uglov, Vladimir | |
| dc.contributor.author | Abadias, Gregory | |
| dc.contributor.author | Zlotski, Sergey | |
| dc.contributor.author | Malashevich, Alexander | |
| dc.contributor.author | Saladukhin, Igor | |
| dc.contributor.author | Barkouskay, Maryna | |
| dc.date.accessioned | 2019-11-13T10:39:37Z | - |
| dc.date.available | 2019-11-13T10:39:37Z | - |
| dc.date.issued | 2019 | |
| dc.identifier.citation | Взаимодействие излучений с твердым телом = Interaction of Radiation with Solids : материалы 13-й Междунар. конф., Минск, Беларусь, 30 сент. – 3 окт. 2019 г. / редкол.: В. В. Углов (отв. ред.) [и др.]. – Минск : БГУ, 2019. – С. 33-36. | |
| dc.identifier.issn | 2663-9939 | |
| dc.identifier.uri | http://elib.bsu.by/handle/123456789/233895 | - |
| dc.description | Секция 1. Процессы взаимодействия излучения и плазмы с твердым телом = Section 1. Processes of Radiation and Plasma Interaction with Solids | |
| dc.description.abstract | The effect of He ions implantation on surface erosion in multilayer CrN/a-Si3N4 films was studied using scanning electron and atomic force microscopy. The CrN/a-Si 3N4 multilayer films with deferent thickness of CrN and Si3N4 layers on a Si (100) substrate were grown via magnetron sputtering. These multilayer films were implanted with 40 keV He 2+ ions with doses of (3-11)∙10 17 cm-2 . AFM studies of the surface of implanted films showed the formation of open blisters consisting of two levels. Low surface erosion in multilayer films with a thickness of the amorphous layer exceeding crystalline was found in comparison with mononitride CrN films. Studies have shown the promising use of crystalline/amorphous boundaries to increase the resistance of materials to radiation erosion. | |
| dc.language.iso | en | |
| dc.publisher | Минск : БГУ | |
| dc.subject | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика | |
| dc.title | Surface Erosion of Multilayer CrN/a-Si3N4 Films under He Ions Implantation | |
| dc.type | conference paper | |
| Располагается в коллекциях: | 2019. Взаимодействие излучений с твердым телом = Interaction of Radiation with Solids | |
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