Please use this identifier to cite or link to this item:
https://elib.bsu.by/handle/123456789/226521| Title: | Выращивание полупроводниковых алмазных поликристаллических тонких пленок в высокочастотном разряде низкого давления |
| Authors: | Никифоренко, Н. Н. Лабуда, А. А. Ткачев, И. П. Бондаренок, В. П. |
| Keywords: | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика |
| Issue Date: | 1999 |
| Publisher: | Минск : Універсітэцкае |
| Citation: | Вестник Белорусского государственного университета. Сер. 1, Физика. Математика. Информатика. – 1999. – № 1. – С. 22-26. |
| Abstract: | The high-frequency vacuum-plasma plant for synthesis of diamond polycrystalline films from methanol vapors was created. It is distinguished for low energy consumption and material expenditure. The growth technology of diamond polycrystalline films 200—300 nm in thickness exhibiting good thermal sensitivity was worked out. |
| URI: | http://elib.bsu.by/handle/123456789/226521 |
| ISSN: | 0321-0367 |
| Licence: | info:eu-repo/semantics/openAccess |
| Appears in Collections: | 1999, №1 (январь) |
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