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Please use this identifier to cite or link to this item: https://elib.bsu.by/handle/123456789/226521
Title: Выращивание полупроводниковых алмазных поликристаллических тонких пленок в высокочастотном разряде низкого давления
Authors: Никифоренко, Н. Н.
Лабуда, А. А.
Ткачев, И. П.
Бондаренок, В. П.
Issue Date: 1999
Publisher: Минск : Універсітэцкае
Citation: Вестник Белорусского государственного университета. Сер. 1, Физика. Математика. Информатика. – 1999. – № 1. – С. 22-26.
Abstract: The high-frequency vacuum-plasma plant for synthesis of diamond polycrystalline films from methanol vapors was created. It is distinguished for low energy consumption and material expenditure. The growth technology of diamond polycrystalline films 200—300 nm in thickness exhibiting good thermal sensitivity was worked out.
URI: http://elib.bsu.by/handle/123456789/226521
ISSN: 0321-0367
Licence: info:eu-repo/semantics/openAccess
Appears in Collections:1999, №1 (январь)

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