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Please use this identifier to cite or link to this item: https://elib.bsu.by/handle/123456789/226302
Title: Исследование структуры арсенида галлия, облученного ионами аргона и фосфора в самоотжиговых режимах
Authors: Акимов, А. Н.
Власукова, Л. А.
Гусаков, Г. А.
Мильчанин, О. В.
Keywords: ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика
Issue Date: 1998
Publisher: Минск : Універсітэцкае
Citation: Вестник Белорусского государственного университета. Сер. 1, Физика. Математика. Информатика. – 1998. – № 1. – С. 38-42.
Abstract: The structure transformations in GaAs irradiated with Ar+ and P+ ions at the ion beam currents 3 and IµA/cm2 respectively in the fluence interval (0,6-6) * 1015Cm-2 have been investigated using Transmission electron microscopy and Rutherford backscattering and channeling. It has been found that ion-beam-induced crystallization (IBIC) in the GaAs layer amorphyzed at the earlier irradiation stages takes place at dose 3 * 1015cm-2. In spite of the lesser heat of a sample the restoration degree of the GaAs crystalline lattice is essentially larger at the implantation of the isovalent phosphorus than at the implantation of inert argon. The observed effect has been explained by the difference of IBIC mechanisms.
URI: http://elib.bsu.by/handle/123456789/226302
ISSN: 0321-0367
Sponsorship: Работа выполнена при финансовой поддержке Фонда фундаментальных исследований Республики Беларусь.
Appears in Collections:1998, №1 (январь)

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