Please use this identifier to cite or link to this item:
https://elib.bsu.by/handle/123456789/223066| Title: | Влагостойкость примесносиликатных стекол |
| Authors: | Лабуда, А. А. Сидерко, А. А. |
| Keywords: | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика |
| Issue Date: | 1997 |
| Publisher: | Минск : Універсітэцкае |
| Citation: | Вестник Белорусского государственного университета. Сер. 1, Физика. Математика. Информатика. – 1997. – № 1. – С. 18-21. |
| Abstract: | Moisture resistance of doped silicate glasses used in planarization of integrated circuits has been experimentally studied. It has been shown that leaching of a dopant can take place under the effect of moisture. The measures aimed at the improvement of moisture resistance of the above glasses are demonstrated. |
| URI: | http://elib.bsu.by/handle/123456789/223066 |
| ISSN: | 0321-0367 |
| Licence: | info:eu-repo/semantics/openAccess |
| Appears in Collections: | 1997, №1 (январь) |
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