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DC Field | Value | Language |
---|---|---|
dc.contributor.author | Лабуда, А. А. | - |
dc.contributor.author | Сидерко, А. А. | - |
dc.date.accessioned | 2019-07-05T09:22:01Z | - |
dc.date.available | 2019-07-05T09:22:01Z | - |
dc.date.issued | 1997 | - |
dc.identifier.citation | Вестник Белорусского государственного университета. Сер. 1, Физика. Математика. Информатика. – 1997. – № 1. – С. 18-21. | ru |
dc.identifier.issn | 0321-0367 | - |
dc.identifier.uri | http://elib.bsu.by/handle/123456789/223066 | - |
dc.description.abstract | Moisture resistance of doped silicate glasses used in planarization of integrated circuits has been experimentally studied. It has been shown that leaching of a dopant can take place under the effect of moisture. The measures aimed at the improvement of moisture resistance of the above glasses are demonstrated. | ru |
dc.language.iso | ru | ru |
dc.publisher | Минск : Універсітэцкае | ru |
dc.rights | info:eu-repo/semantics/openAccess | en |
dc.subject | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика | ru |
dc.title | Влагостойкость примесносиликатных стекол | ru |
dc.type | article | ru |
Appears in Collections: | 1997, №1 (январь) |
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