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dc.contributor.authorЛабуда, А. А.-
dc.contributor.authorСидерко, А. А.-
dc.date.accessioned2019-07-05T09:22:01Z-
dc.date.available2019-07-05T09:22:01Z-
dc.date.issued1997-
dc.identifier.citationВестник Белорусского государственного университета. Сер. 1, Физика. Математика. Информатика. – 1997. – № 1. – С. 18-21.ru
dc.identifier.issn0321-0367-
dc.identifier.urihttp://elib.bsu.by/handle/123456789/223066-
dc.description.abstractMoisture resistance of doped silicate glasses used in planarization of integrated circuits has been experimentally studied. It has been shown that leaching of a dopant can take place under the effect of moisture. The measures aimed at the improvement of moisture resistance of the above glasses are demonstrated.ru
dc.language.isoruru
dc.publisherМинск : Універсітэцкаеru
dc.rightsinfo:eu-repo/semantics/openAccessen
dc.subjectЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физикаru
dc.titleВлагостойкость примесносиликатных стеколru
dc.typearticleru
Appears in Collections:1997, №1 (январь)

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