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Please use this identifier to cite or link to this item: https://elib.bsu.by/handle/123456789/206643
Title: Investigation of metal evaporation and film deposition at middle vacuum by using a glow discharge electron gun
Authors: Porytsky, P. V.
Kononov, A. V.
Denbnovetsky, S. V.
Melnyk, V. I.
Melnyk, I. V.
Keywords: ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика
Issue Date: 1999
Publisher: Минск : БГУ
Citation: Взаимодействие излучений с твердым телом: Материалы III междунар. науч. конф., 6-8 окт. 1999 г., Минск: В 2 ч. Ч.2. — Мн.: БГУ, 1999. — С. 192-194.
Abstract: Glow discharge electron guns are widely used for realising different technological operations in the soft vacuum [1-4]. Its may be successfully applied for reactive evaporation of thing film of oxides and nitrides, which are used for covering of mechanical instrument and for obtaining of dielectric films in microelectronics [3,5]. In the present work the mathematical model of steam flow distribution and it condensation in the substrate is proposed and realised and its experimental verification provided.
URI: http://elib.bsu.by/handle/123456789/206643
ISBN: 985-445-237-9
Appears in Collections:1999. Взаимодействие излучений с твердым телом

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