Investigation of metal evaporation and film deposition at middle vacuum by using a glow discharge electron gun

Abstract

Glow discharge electron guns are widely used for realising different technological operations in the soft vacuum [1-4]. Its may be successfully applied for reactive evaporation of thing film of oxides and nitrides, which are used for covering of mechanical instrument and for obtaining of dielectric films in microelectronics [3,5]. In the present work the mathematical model of steam flow distribution and it condensation in the substrate is proposed and realised and its experimental verification provided.