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https://elib.bsu.by/handle/123456789/195153| Title: | Оптимизация процесса формирования диэлектрических микроволноводов на основе системы полимер/SіО2/Sі |
| Authors: | Леонтьев, Александр Викторович |
| Keywords: | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика |
| Issue Date: | 2004 |
| Publisher: | Минск : БГУ |
| Citation: | Вестник Белорусского государственного университета. Сер. 1, Физика. Математика. Информатика. – 2004. - № 2. – С. 45-52. |
| Abstract: | Physical and mathematical aspects of optimization of the forming process of dielectric microwaveguides on the basis of polymer/ SіО2/Sі system with the usage of ion irradiation technology is presented. The chance sequence of parameters of implanted particles is shown. This sequence allows to simplify development of technological aspects of the formation of stepped and gradient microwaveguides on the basis of considered system. |
| URI: | http://elib.bsu.by/handle/123456789/195153 |
| ISSN: | 0321-0367 |
| Licence: | info:eu-repo/semantics/openAccess |
| Appears in Collections: | 2004, №2 (май) |
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