Please use this identifier to cite or link to this item:
https://elib.bsu.by/handle/123456789/182331| Title: | Modification of amorphous Si-rich SiNx matrix by irradiation with swift heavy ions |
| Authors: | Murzalinov, D. Akilbekov, A. Dauletbekova, A. Vlasukova, L. Makhavikou, M. |
| Keywords: | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика |
| Issue Date: | 2017 |
| Publisher: | Минск: Изд. центр БГУ |
| Citation: | Взаимодействие излучений с твердым телом = Interaction of Radiation with Solids: материалы 12-й Междунар. конф., Минск, Беларусь, 19—22 сент. 2017 г. / редкол.: В.В. Углов (отв.ред.) [и др.]. — Минск: Изд. центр БГУ, 2017. — С. 103-105. |
| Abstract: | The effects of 200 MeV-Xe+ irradiation with fluencies of (109-1014) cm-2 on the phase-structural transformation of Si-rich SiNx film deposited on Si substrate by LPCVD have been reported. It has been shown from RS data that the SHI irradiation results in the dissolution of amorphous Si nanoclusters in nitride matrix. It has been shown, too, that the SHI irradiation leads to quenching a visual PL from nitride films. It can be suggested that SHI irradiation before annealing can result in the formation of Si phase in nitride matrix with less Si excess in comparison the ordinary thermal annealing |
| Description: | Секция 2. Радиационные эффекты в твердом теле |
| URI: | http://elib.bsu.by/handle/123456789/182331 |
| ISBN: | 978-985-553-446-5 |
| Appears in Collections: | 2017. Взаимодействие излучений с твердым телом = Interaction of Radiation with Solids |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| 103-105.pdf | 389,02 kB | Adobe PDF | View/Open |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.