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Электронная библиотека БГУ
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Browsing by Author Tsurko, V. A.
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2009
Numerical method for computer modeling of diffusion of implanted dopant atoms in silicon in modern VLSI technology
Khina, B. B.
;
Tsurko, V. A.
;
Zayats, G. M.
2001
Simulation of plasma assisted doping of silicon
Velichko, O. I.
;
Dobrushkin, V. A.
;
Tsurko, V. A.
;
Senko, N. A.