Effect of He+ ion irradiation on structure and wear resistance of TiAlN coatings deposited by magnetron sputtering

Abstract

Hard and super-hard coatings have a lot of applications in modern physics and technique /1/. One of the most promising applications of these coatings is tribological sphere. TiAlN coatings are widely spread in many different machine building applications as they are hard, resistant to corrosion and relatively easy in production. There are a lot of methods of vacuum coating depositions: vacuum arc deposition, chemical vapor deposition, plating and others, but the method of reactive magnetron sputtering gives an opportunity to obtain coatings with a very dense structure and without a drop fraction /2/. It is of great interest to investigate the influence of ion irradiation on structure and properties of the TiAlN coatings.