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OPTICAL AND ELECTROPHYSICAL PROPERTIES OF NITRIDE TiAlSiN AND CARBONITRIDE TiAlSiCN COATINGS: INFLUENCE OF REACTIVE MAGNETRON DEPOSITION REGIMES 143

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OPTICAL AND ELECTROPHYSICAL PROPERTIES OF NITRIDE TiAlSiN AND CARBONITRIDE TiAlSiCN COATINGS: INFLUENCE OF REACTIVE MAGNETRON DEPOSITION REGIMES 0 4 4 6 78 4 18

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