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Structural properties and oxidation resistance of ZrN/SiNx, CrN/SiNx and AlN/SiNx multilayered films deposited by magnetron sputtering technique 294

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Structural properties and oxidation resistance of ZrN/SiNx, CrN/SiNx and AlN/SiNx multilayered films deposited by magnetron sputtering technique 14 68 24 24 17 16 2

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