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Structural properties and oxidation resistance of ZrN/SiNx, CrN/SiNx and AlN/SiNx multilayered films deposited by magnetron sputtering technique 160

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Structural properties and oxidation resistance of ZrN/SiNx, CrN/SiNx and AlN/SiNx multilayered films deposited by magnetron sputtering technique 9 8 2 8 8 14 17

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