Optical and Electrophysical Properties of Thin Zinc Oxide Films Doped with Manganese Oxide and Obtained by Laser Deposition

Abstract

Nanostructured thin fi lms on a silicon substrate were obtained on a ceramic of zinc oxide doped with manganese oxide by high-frequency periodic pulsed laser action with f ~ 10–15 kHz, wavelength λ = 1.064 μm at power density q = 150 MW/cm2 in a vacuum chamber with p = 2.7 Pa. The surface morphology and the elemental composition of the obtained fi lms were studied using atomic force microscopy, scanning electron microscopy, and X-ray spectral microanalysis. Features of the transmission spectra in the visible, near, and middle IR regions were determined. The electrophysical properties of the ZnO + 2% MnO2/Si heterostructure were analyzed.