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Influence of Monolayers Thicknesses Ratio on Stability of Structure and Phase Composition of CrN/SiNx Multilayered Coatings under Air Annealing 171

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Influence of Monolayers Thicknesses Ratio on Stability of Structure and Phase Composition of CrN/SiNx Multilayered Coatings under Air Annealing 3 7 3 1 6 4 9

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