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https://elib.bsu.by/handle/123456789/264722
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Поле DC | Значение | Язык |
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dc.contributor.author | Yuryev, V.A. | - |
dc.contributor.author | Chizh, K.V. | - |
dc.contributor.author | Chapnin, V.A. | - |
dc.contributor.author | Mironov, S.A. | - |
dc.contributor.author | Dubkov, V.P. | - |
dc.contributor.author | Uvarov, O.V. | - |
dc.contributor.author | Kalinushkin, V.P. | - |
dc.contributor.author | Senkov, V.M. | - |
dc.contributor.author | Nalivaiko, O.Y. | - |
dc.contributor.author | Novikau, A.G. | - |
dc.contributor.author | Gaiduk, P.I. | - |
dc.date.accessioned | 2021-07-26T08:40:41Z | - |
dc.date.available | 2021-07-26T08:40:41Z | - |
dc.date.issued | 2015 | - |
dc.identifier.citation | J Appl Phys 2015;117(20). | ru |
dc.identifier.uri | https://elib.bsu.by/handle/123456789/264722 | - |
dc.description.abstract | Platinum silicide Schottky diodes formed on films of polycrystalline Si doped by phosphorus are demonstrated to be efficient and manufacturable CMOS-compatible temperature sensors for microbolometer detectors of radiation. Thin-film platinum silicide/poly-Si diodes have been produced by a CMOS-compatible process on artificial Si3N4/SiO2/Si(001) substrates simulating the bolometer cells. Layer structure and phase composition of the original Pt/poly-Si films and the Pt silicide/poly-Si films synthesized by a low-temperature process have been studied by means of the scanning transmission electron microscopy; they have also been explored by means of the two-wavelength X-ray structural phase analysis and the X-ray photoelectron spectroscopy. Temperature coefficient of voltage for the forward current of a single diode is shown to reach the value of about -2%/ °C in the temperature interval from 25 to 50 °C. | ru |
dc.description.sponsorship | Seventh Framework Programme (FP7), 298932 | ru |
dc.language.iso | en | ru |
dc.publisher | American Institute of Physics Inc. | ru |
dc.subject | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика | ru |
dc.title | Pt silicide/poly-Si Schottky diodes as temperature sensors for bolometers | ru |
dc.type | article | ru |
dc.rights.license | CC BY 4.0 | ru |
dc.identifier.DOI | 10.1063/1.4921595 | - |
dc.identifier.scopus | 84930079192 | - |
Располагается в коллекциях: | Статьи |
Полный текст документа:
Файл | Описание | Размер | Формат | |
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1503.05700.pdf | 798,61 kB | Adobe PDF | Открыть |
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