Please use this identifier to cite or link to this item:
https://elib.bsu.by/handle/123456789/26349| Title: | PULSE PHOTON TREATMENT OF TiN/Ti/Si SYSTEM |
| Authors: | Chaplanov, A. M. Karwat, С. Kolos, V. V. |
| Keywords: | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика |
| Issue Date: | 2011 |
| Citation: | Взаимодействие излучений с твердым телом = Interaction of Radiation with Solids: Материалы 9-й Междунар. конф., 20-22 сент. 2011 г. — Минск,2011. |
| Abstract: | The papes present an effect of arsenium dose implanted in silicon substrate on titanium silicide growth during pulse photon processing. |
| URI: | http://elib.bsu.by/handle/123456789/26349 |
| Appears in Collections: | 2011. Взаимодействие излучений с твердым телом |
Files in This Item:
| File | Description | Size | Format | |
|---|---|---|---|---|
| Chaplanov-Маркевич+Deshkovs.pdf | 503,44 kB | Adobe PDF | View/Open |
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