Please use this identifier to cite or link to this item:
https://elib.bsu.by/handle/123456789/256175| Title: | Исследование процесса осаждения борофосфоросиликатного стекла при атмосферном давлении |
| Authors: | Лабуда, А. А. Сидерко, А. А. |
| Keywords: | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика |
| Issue Date: | 1993 |
| Publisher: | Минск : Университетское |
| Citation: | Вестник Белорусского государственного университета. Сер. 1, Физика. Математика. Механика. – 1993. – № 3. – С. 25-27. |
| Abstract: | The results of an experimental study of the process of borosilicate-glass deposition with planarization of the integral-circuit surface are presented. The optimum regime of this process is determined in terms of deposition rate. The dependence of doping concentration on technological parameters is determined |
| URI: | https://elib.bsu.by/handle/123456789/256175 |
| ISSN: | 0321-0367 |
| Licence: | info:eu-repo/semantics/openAccess |
| Appears in Collections: | 1993, №3 (сентябрь) |
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