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| A Model of High-Concentration Phosphorus Diffusion in Silicon with Account for Crystal Lattice Deformation and Formation of Negatively Charged Clusters | 271 |
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| A Model of High-Concentration Phosphorus Diffusion in Silicon with Account for Crystal Lattice Deformation and Formation of Negatively Charged Clusters | 4 | 10 | 4 | 39 | 14 | 16 | 2 |
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