Please use this identifier to cite or link to this item:
https://elib.bsu.by/handle/123456789/246846| Title: | Дефектность слоев борофосфоросиликатного стекла, осажденного при атмосферном давлении |
| Authors: | Лабуда, А. А. Сидерко, А. А. |
| Keywords: | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика |
| Issue Date: | 1995 |
| Publisher: | Минск : Універсітэцкае |
| Citation: | Вестник Белорусского государственного университета. Сер. 1, Физика. Математика. Механика. – 1995. – № 1. – С. 30-34. |
| Abstract: | The conditions of defect formation in the layers of borophosphosilicate glass in the process of planarization have been determined, their classification has been performed and the processing regimes for their minimization have been, determined |
| URI: | https://elib.bsu.by/handle/123456789/246846 |
| ISSN: | 0321-0367 |
| Licence: | info:eu-repo/semantics/openAccess |
| Appears in Collections: | 1995, №1 (январь) |
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