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Phase Composition Stability of ZrN/SiNх Multilayered Coatings under Air Annealing: the Role of the Thicknesses Ratio of the Elementary Layers 316

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Phase Composition Stability of ZrN/SiNх Multilayered Coatings under Air Annealing: the Role of the Thicknesses Ratio of the Elementary Layers 2 7 43 24 16 19 0

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