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https://elib.bsu.by/handle/123456789/226520| Title: | Влияние деформационных напряжений, создаваемых атомами магния, на образование радиационных дефектов в кремнии |
| Authors: | Казакевич, Л. А. Лугаков, П. Ф. |
| Keywords: | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика |
| Issue Date: | 1999 |
| Publisher: | Минск : Універсітэцкае |
| Citation: | Вестник Белорусского государственного университета. Сер. 1, Физика. Математика. Информатика. – 1999. – № 1. – С. 19-22. |
| Abstract: | The effect of impurity magnesium on the accumulation processes of compensating radiation defects in epitaxial Si layers was studied. Increase of the A- and E-centres production rates during additional doping of epitaxial layers by magnesium was discovered. The results obtained are explained taking into account compensation by magnesium atoms of the surface-induced elastic stress fields. |
| URI: | http://elib.bsu.by/handle/123456789/226520 |
| ISSN: | 0321-0367 |
| Licence: | info:eu-repo/semantics/openAccess |
| Appears in Collections: | 1999, №1 (январь) |
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