Please use this identifier to cite or link to this item:
https://elib.bsu.by/handle/123456789/226332| Title: | Планаризация поверхности изолирующего диэлектрика с использованием быстрой термической обработки |
| Authors: | Пономарь, В. Н. Пилипенко, В. А. Горушко, В. А. Тарасик, М. И. |
| Keywords: | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика |
| Issue Date: | 1998 |
| Publisher: | Минск : Універсітэцкае |
| Citation: | Вестник Белорусского государственного университета. Сер. 1, Физика. Математика. Информатика. – 1998. – № 2. – С. 26-29. |
| Abstract: | Fusing processes in boron- and phosphor-silicate glasses using rapid thermal processing were investigated. It is shown that this method leads to improvement of electrical characteristics of the elements in integrated circuits. |
| URI: | http://elib.bsu.by/handle/123456789/226332 |
| ISSN: | 0321-0367 |
| Licence: | info:eu-repo/semantics/openAccess |
| Appears in Collections: | 1998, №2 (май) |
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