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Please use this identifier to cite or link to this item: https://elib.bsu.by/handle/123456789/226332
Title: Планаризация поверхности изолирующего диэлектрика с использованием быстрой термической обработки
Authors: Пономарь, В. Н.
Пилипенко, В. А.
Горушко, В. А.
Тарасик, М. И.
Issue Date: 1998
Publisher: Минск : Універсітэцкае
Citation: Вестник Белорусского государственного университета. Сер. 1, Физика. Математика. Информатика. – 1998. – № 2. – С. 26-29.
Abstract: Fusing processes in boron- and phosphor-silicate glasses using rapid thermal processing were investigated. It is shown that this method leads to improvement of electrical characteristics of the elements in integrated circuits.
URI: http://elib.bsu.by/handle/123456789/226332
ISSN: 0321-0367
Licence: info:eu-repo/semantics/openAccess
Appears in Collections:1998, №2 (май)

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