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https://elib.bsu.by/handle/123456789/206612| Заглавие документа: | Формирование углеродных пленок лазерным осаждением |
| Другое заглавие: | Carbon films formation using laser deposition / V.K.Goncharov, M.V.Puzyrev, V.N.Popok |
| Авторы: | Гончаров, В. К. Пузырев, М. В. Попок, В. Н. |
| Тема: | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика |
| Дата публикации: | 1999 |
| Издатель: | Минск : БГУ |
| Библиографическое описание источника: | Взаимодействие излучений с твердым телом: Материалы III междунар. науч. конф., 6-8 окт. 1999 г., Минск: В 2 ч. Ч.2. — Мн.: БГУ, 1999. — С. 128-130. |
| Аннотация: | Предложена оригинальная установка и методика синтеза углеродных пленок путем испарения с помощи лазерного импульса поверхности углеродного источника и последующего осаждения пленок на сторонней подложке. Представлены данные ЭПР исследований полученных пленок в зависимости от условий синтеза. Продемонстрирована возможность создания углеродных пленок с различной степенью структурного совершенства, вплоть до алмазоподобных. |
| Аннотация (на другом языке): | Synthesis of carbon materials with great extent of structural perfection is an actual problem of electronic and optical technology, strengthening of surfaces etc. Recent years the diamond-like films are widely used for these purposes. Recently high quality diamond-like carbon films with microhardness comparable to natural diamond have been produced using laser deposition [1-3]. Employing of lasers bring such advantages as a cleanness and accuracy of carbon film deposition. Pulsed laser irradiation allows to decrease demands to the vacuum too. The special equipment with Nd-glass laser was used for carbon films synthesis in our case. Deposition of the carbon film on the substrate is carried out from erosion laser plasma formed as a result of interaction of laser radiation with the carbon target. The equipment consists of a vacuum chamber, laser source, focuser and synchronization system (see fig.) The carbon target is situated under 45 degree to the axle of the laser beam. The substrate is placed in parallel to the target. Thin glass, silicon, pyroceramic and quartz wafers were used as substrates. Distance between the target and substrate, energy of laser radiation, number of impulses are varied for reaching of optimal synthesis regimes. Vacuum was 5 10 s torr. The ESR studies of the synthesized films were carried out using the X-band spectrometer Varian E112 at room temperature [4]. Concentration of paramagnetic centers (PC) is calculated using standard samples. It was found that the structure of the formed films depends strongly on the regime of synthesis and nature of the substrate. Interesting results was obtained on the glass substrate. Aftertwo laser impulses (energies of 12 and 8 J) the thin (some tens of nm) film is formed. The ESR spectrum of the film exhibits the singlet isotropic signal with g=2,0036. The line width is 7,5 G. This signal can be caused by localized л-electrons of carbon situated in the surface layer of graphite that is one of allotropic form of carbon. The PC concentration is about 1018 spin/g. We can suppose that the thin film of graphite is synthesized at above mentioned conditions. At lower energies and greater numbers of laser impulses the ESR spectra are transformed. For example, after synthesis at 2,5 J and 20 impulses we obtained films for which the singlet isotropic signal with g=2,0025 and line width of 5,5 G is observed. The similar signal was found for diamond-like films [5, 6]. But using only the ESR method is not enough for identification of created films. In conclusion, the equipment for laser deposition of thin carbon films was tested. Using the ESR method the paramagnetic parameters of the films was investigated. The possibility of different carbon materials formation by changing of synthesis regimes is demonstrated. |
| URI документа: | http://elib.bsu.by/handle/123456789/206612 |
| ISBN: | 985-445-237-9 |
| Располагается в коллекциях: | 1999. Взаимодействие излучений с твердым телом |
Полный текст документа:
| Файл | Описание | Размер | Формат | |
|---|---|---|---|---|
| 128-130.pdf | 2,93 MB | Adobe PDF | Открыть |
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