Please use this identifier to cite or link to this item:
https://elib.bsu.by/handle/123456789/205830
Title: | Cluster ion beam facilities |
Authors: | Popok, V. N. Prasalovich, S. V. Odzhaev, V. B. Campbell, E. E. B. |
Keywords: | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика |
Issue Date: | 2001 |
Publisher: | Минск : БГУ |
Citation: | Взаимодействие излучений с твердым телом: материалы IV Междунар. науч. конф., 3-5 окт. 2001 г., Минск. — Мн.: БГУ, 2001. — С. 376-378. |
Abstract: | A brief state-of-the-art review in the field of cluster-surface interactions is presented. Ionised cluster beams could become a powerful and versatile tool for the modification and processing of surfaces as an alternative to ion implantation and ion assisted deposition. The main effects of cluster-surface collisions and possible applications of cluster ion bieams are discussed. The outlooks of the Cluster Implantation and Deposition Apparatus (CIDA) being developed in Goteborg University are shown. |
URI: | http://elib.bsu.by/handle/123456789/205830 |
ISBN: | 985-445-236-0 |
Appears in Collections: | 2001. Взаимодействие излучений с твердым телом |
Files in This Item:
File | Description | Size | Format | |
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376-378.pdf | 735,63 kB | Adobe PDF | View/Open |
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