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Please use this identifier to cite or link to this item: https://elib.bsu.by/handle/123456789/205830
Title: Cluster ion beam facilities
Authors: Popok, V. N.
Prasalovich, S. V.
Odzhaev, V. B.
Campbell, E. E. B.
Keywords: ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика
Issue Date: 2001
Publisher: Минск : БГУ
Citation: Взаимодействие излучений с твердым телом: материалы IV Междунар. науч. конф., 3-5 окт. 2001 г., Минск. — Мн.: БГУ, 2001. — С. 376-378.
Abstract: A brief state-of-the-art review in the field of cluster-surface interactions is presented. Ionised cluster beams could become a powerful and versatile tool for the modification and processing of surfaces as an alternative to ion implantation and ion assisted deposition. The main effects of cluster-surface collisions and possible applications of cluster ion bieams are discussed. The outlooks of the Cluster Implantation and Deposition Apparatus (CIDA) being developed in Goteborg University are shown.
URI: http://elib.bsu.by/handle/123456789/205830
ISBN: 985-445-236-0
Appears in Collections:2001. Взаимодействие излучений с твердым телом

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