Please use this identifier to cite or link to this item:
https://elib.bsu.by/handle/123456789/196308| Title: | Модернизация TRIM-алгоритма метода Монте-Карло |
| Authors: | Леонтьев, Александр Викторович |
| Keywords: | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика |
| Issue Date: | 2002 |
| Publisher: | Минск : БГУ |
| Citation: | Вестник Белорусского государственного университета. Сер. 1, Физика. Математика. Информатика. – 2002. - № 2. – С. 27-31. |
| Abstract: | The problem questions of the ion beam masking in microelectronics are considered. Is shown, that the decision of the put task consists of two parts: a choice of optimum thickness of a protective mask and control arising at the subsequent. |
| URI: | http://elib.bsu.by/handle/123456789/196308 |
| ISSN: | 0321-0367 |
| Licence: | info:eu-repo/semantics/openAccess |
| Appears in Collections: | 2002, №2 (май) |
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