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https://elib.bsu.by/handle/123456789/195052| Title: | Воздействие на кремний ускоренных потоков лазерно-эрозионной плазмы тяжелых металлов |
| Authors: | Комаров, Ф. Ф. Людчик, О. Р. Петров, С. А. Соловьев, В. С. |
| Keywords: | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика |
| Issue Date: | 2000 |
| Publisher: | Минск : Універсітэцкае |
| Citation: | Вестник Белорусского государственного университета. Сер. 1, Физика. Математика. Информатика. – 2000. - № 2. – С. 38-41. |
| Abstract: | The processes of silicide and wurtzite-phase formation in Si bombarded by Hf, Ta and W beams with 10 keV energy and the dose of irradiation 5-1015 and 2,5-1016 cm 2 are investigated by using the methods of ТЕМ and Rutherford backscattering spectroscopy. Possible mechanisms of structure-phase transformations are discussed. |
| URI: | http://elib.bsu.by/handle/123456789/195052 |
| ISSN: | 0321-0367 |
| Licence: | info:eu-repo/semantics/openAccess |
| Appears in Collections: | 2000, №2 (май) |
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