Effect of annealing on the Structure of thermal evaporated In2S3 thin films

Abstract

Structural studies on In2S3 thin films deposited by vacuum thermal evaporation on glass substrates at a temperature of 240°C, followed by annealing at 330°C and 400°C are presented. It was shown that the films were of amorphous in nature before annealing and after annealing the films became polycrystalline and showed β- In2S3 structure. The grain size increased and followed the usual crystal growth process as the annealing temperature increased. The annealing-induced changes of surface roughness were characterized by atomic force microscopy.