Investigation of long-range effect in glasses after ion implantation

Abstract

The effect of long-range action, propagation of structural disturbances to distances which greatly exceed the penetration depth of implanted atoms, was found in silicate glasses subjected to ion bombardment. Conditions of bombardment: ion energy 60-500 keV, fluence 1015-1018 cm-2, current density 1-5 A/cm2. As bombarding ions were used: Li+, Na+, B+, N+, P+, F+, Ag+, In+, As+, Sb+. The presence of this effect is confirmed experimentally by a sharp increase of microhardness of the reverse side of the specimen and changes of its wear resistance. The reason of the long-range action effect is strong dynamic compression of the structural net of the surface layers on the reverse side by shock waves that accompany ion-beam treatment