Self-consistent approach to x-ray reflection from rough surfaces

Abstract

A self-consistent analytical approach for specular x-ray reflection from interfaces with transition layers I. D. Feranchuk et al., Phys. Rev. B 67, 235417 2003 based on the distorted-wave Born approximation DWBA is used for the description of coherent and incoherent x-ray scattering from rough surfaces and interfaces. This approach takes into account the transformation of the modeling transition layer profile at the interface, which is caused by roughness correlations. The reflection coefficients for each DWBA order are directly calculated without phenomenological assumptions on their exponential decay at large scattering angles. Various regions of scattering angles are discussed, which show qualitatively different dependence of the reflection coefficient on the scattering angle. The experimental data are analyzed using the method developed.