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https://elib.bsu.by/handle/123456789/14173| Title: | Свойства бистабильных водородосодержащих доноров в эпитаксиальном кремнии, имплантированном протонами |
| Authors: | Покотило, Ю. М. Петух, А. Н. Цвырко, В. Т. |
| Keywords: | ЭБ БГУ::ЕСТЕСТВЕННЫЕ И ТОЧНЫЕ НАУКИ::Физика |
| Issue Date: | Jan-2007 |
| Publisher: | БГУ |
| Citation: | Вестник Белорусского государственного университета. Сер. 1, Физика. Математика. Информатика. – 2007. - № 1. – С. 28-32. |
| Abstract: | Hydrogen donors formation processes are studied in epitaxial silicon implanted with 300 keV protons. Different types of hydrogen donors are formed in dependence on annealing conditions and fiuences. Hydrogen double donors (HDD) are formed on early annealing stage. HDD possess bistability property. |
| URI: | http://elib.bsu.by/handle/123456789/14173 |
| ISSN: | 0321-0367 |
| Licence: | info:eu-repo/semantics/openAccess |
| Appears in Collections: | 2007, №1 (январь) |
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