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Please use this identifier to cite or link to this item: https://elib.bsu.by/handle/123456789/14173
Title: Свойства бистабильных водородосодержащих доноров в эпитаксиальном кремнии, имплантированном протонами
Authors: Покотило, Ю. М.
Петух, А. Н.
Цвырко, В. Т.
Issue Date: Jan-2007
Publisher: БГУ
Citation: Вестник Белорусского государственного университета. Сер. 1, Физика. Математика. Информатика. – 2007. - № 1. – С. 28-32.
Abstract: Hydrogen donors formation processes are studied in epitaxial silicon implanted with 300 keV protons. Different types of hydrogen donors are formed in dependence on annealing conditions and fiuences. Hydrogen double donors (HDD) are formed on early annealing stage. HDD possess bistability property.
URI: http://elib.bsu.by/handle/123456789/14173
ISSN: 0321-0367
Licence: info:eu-repo/semantics/openAccess
Appears in Collections:2007, №1 (январь)

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