Sensor for Scanning Near-Field Optical Microscope

Abstract

A new surface sensor for scanning near-field optical microscope based on a piezoelectric tuning fork has been designed and fabricated. The registered values of the quality factor of the oscillatory system of the produced device are in the range of 4000 $\div $ 8000, this value is high enough and confirms its work capacity. Created useful model can be applied for obtaining the optical image of the surface of micro-objects with the super-resolution of some tens of nanometers. Also it allows to apply methods of optical spectroscopy for local investigations of microbiological and semiconductor objects, to modify surfaces at a super-dense information recording and nanolithography, to influence selectively the elements of biostructures.