Browsing by Author Mironov, A. M.
Showing results 1 to 2 of 2
Preview | Issue Date | Title | Author(s) |
| 2012 | Controlling Boron Diffusion during Rapid Thermal Annealing with CoImplantation by Amphoteric Impurity Atoms | Makarevich, Yu. V.; Komarov, F. F.; Komarov, A. F.; Mironov, A. M.; Zayats, G. M.; Miskevich, S. A. |
| 2013 | Modeling of Thermal Processing at the Formation of Shallow Doped IC Active Regions | Komarov, A. F.; Velichko, O. I.; Zayats, G. M.; Komarov, F. F.; Miskiewicz, S. A.; Mironov, A. M.; Makarevich, Yu. V. |